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National Chung Hsing University Institutional Repository - NCHUIR > 工學院 > 工學院 > 依資料類型分類 > 期刊論文 >  Effect of a Ti interlayer on the bond strength and thermal stability of the Cu/benzocyclobutene-divinyl tetramethyldisiloxane interface

Please use this identifier to cite or link to this item: http://nchuir.lib.nchu.edu.tw/handle/309270000/128596

標題: Effect of a Ti interlayer on the bond strength and thermal stability of the Cu/benzocyclobutene-divinyl tetramethyldisiloxane interface
作者: Shieu, F.S.;Shiao, M.H.
薛富盛
關鍵字: Cu;Ti;BCB-DVS;cross-sectional TEM;bond strength;thermal stability;polyimide
日期: 1998
Issue Date: 2012-12-07 14:56:03 (UTC+8)
關連: Journal of Adhesion Science and Technology, Volume 12, Issue 1, Page(s) 19-28.
摘要: A series of experiments were carried out to investigate the adhesion properties and thermal stability of Cu/benzocyclobutene-divinyl tetramethyldisiloxane (BCB-DVS) interfaces by a stud pull test and cross-sectional transmission electron microscopy (TEM), respectively. Multilayered specimens were prepared by spin-coating a layer of BCB-DVS onto a Si wafer and subsequently a layer of Cu was deposited on the BCB-DVS by electron beam evaporation. It was found that the average bond strength of the Cu/BCB-DVS interface was improved slightly by either Ar ion bombardment of the BCB-DVS surface or a Ti interlayer between Cu and BCB-DVS. A significant improvement was obtained by a combination of Ar ion bombardment and a Ti interlayer, and resulted in the formation of titanium carbides or oxides between Ti and BCB-DVS. Upon annealing the specimens at 260 degrees C in vacuum for 18 h, interdiffusion of Cu into BCB-DVS to form clusters was observed, by cross-sectional TEM, for specimens with a 5 nm Ti interlayer, whereas the Cu island was not present in specimens with a 20 nm Ti interlayer. Interfacial reactions upon annealing were demonstrated by the formation of Cu3TiO5 and Cu-Ti intermetallics, identified by selected area diffraction.
Relation: Journal of Adhesion Science and Technology
Appears in Collections:[依資料類型分類] 期刊論文
[依教師分類] 薛富盛

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