English  |  正體中文  |  简体中文  |  Items with full text/Total items : 43312/67235
Visitors : 2077131      Online Users : 3
RC Version 5.0 © Powered By DSPACE, MIT. Enhanced by NTU/NCHU Library IR team.
National Chung Hsing University Institutional Repository - NCHUIR > 工學院 > 工學院 > 依資料類型分類 > 期刊論文 >  Characterization of AlN thin films prepared by unbalanced magnetron sputtering

Please use this identifier to cite or link to this item: http://nchuir.lib.nchu.edu.tw/handle/309270000/128612

標題: Characterization of AlN thin films prepared by unbalanced magnetron sputtering
作者: Wang, C.C.;Chiu, M.C.;Shiao, M.H.;Shieu, F.S.
薛富盛
關鍵字: ray photoelectron-spectroscopy;pulsed-laser deposition;aluminum;nitride films;low-temperature;microstructure;coatings;behavior;ablation;silicon
日期: 2004
Issue Date: 2012-12-07 14:56:36 (UTC+8)
關連: Journal of the Electrochemical Society, Volume 151, Issue 10, Page(s) F252-F256.
摘要: Aluminum nitride (AIN) thin films were deposited on silicon wafers and glass substrates by an unbalanced magnetron (UBM) sputtering system equipped with a pulse dc power supply. Microstructure and chemistry of the AIN-coated specimens were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS). The optical transmission properties of the AIN-coated glass were investigated using an ultraviolet/visible (UV/VIS) spectrophotometer. It was found that the thin films are polycrystalline and have a hexagonal wurtzite structure with (002) preferred orientation, as revealed by XRD and TEM. AFM analysis indicates that the surface of the thin films is smooth, with an average roughness R-a = 6.464 nm, which is suitable for application in surface acoustic wave devices. XPS analysis gives the chemical composition of the coatings as well as the bonding states of the elements. In addition, the AIN thin films are transparent in the visible region with an average transmittance of 60%. (C) 2004 The Electrochemical Society.
Relation: Journal of the Electrochemical Society
Appears in Collections:[依資料類型分類] 期刊論文
[依教師分類] 薛富盛

loading Web of Knowledge data....

Files in This Item:

File SizeFormat
index.html0KbHTML345View/Open


 


學術資源

著作權聲明

本網站為收錄中興大學學術著作及學術產出,已積極向著作權人取得全文授權,並盡力防止侵害著作權人之權益。如仍發現本網站之數位內容有侵害著作權人權益情事者,請權利人通知本網站維護人員,將盡速為您處理。

本網站之數位內容為國立中興大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用。

聯絡網站維護人員:wyhuang@nchu.edu.tw,04-22840290 # 412。

DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU/NCHU Library IR team Copyright ©   - Feedback