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National Chung Hsing University Institutional Repository - NCHUIR > 工學院 > 工學院 > 依資料類型分類 > 期刊論文 >  Effect of annealing on the Nb-doped TiO(2) films prepared by DC/RF cosputtering

Please use this identifier to cite or link to this item: http://nchuir.lib.nchu.edu.tw/handle/309270000/128614

標題: Effect of annealing on the Nb-doped TiO(2) films prepared by DC/RF cosputtering
作者: Yao, H.C.;Chiu, M.C.;Tsai, D.C.;Huang, C.J.;Shieu, F.S.
薛富盛
關鍵字: ray photoelectron-spectroscopy;anatase thin-films;oxygen gas sensor;titanium-dioxide;photocatalytic degradation;metal-ion;structural-properties;optical-properties;water;mechanisms
日期: 2008
Issue Date: 2012-12-07 14:56:39 (UTC+8)
關連: Journal of the Electrochemical Society, Volume 155, Issue 9, Page(s) G173-G179.
摘要: Nb-doped titanium oxide (TiO(2)) thin films were deposited on glass by dc/radio-frequency (dc/rf) magnetron cosputtering, in which dc and rf were utilized for Ti and Nb targets, respectively. The coated samples were postannealed at temperatures ranging from 473 to 773 K for 1 h in ambient air. Glancing incidence X-ray diffraction revealed a polycrystalline phase for the Nb-doped films postannealed at 523 K, in contrast to the undoped one that has to be annealed at 723 K, indicating that Nb dopant can enhance the crystallization of amorphous TiO(2). Furthermore, the as-deposited Nb-doped film postannealed at 673 K was found to have an anatase-dominated phase with a fine-grain microstructure observed by transmission electron microscopy. Heat-treatment also induces a change in the surface morphology of the TiO(2) films examined by field-emission scanning electron microscopy. The optical properties of the TiO(2) films were characterized by UV/visible spectrophotometry. The average transmittance of the films is higher than 85%, and a small absorbance zone occurs in the visible region. Under visible light irradiation, all the Nb-doped TiO(2) films exhibit better photocatalytic activity than that of undoped ones. Among them, the Nb-doped TiO(2) film annealed at 673 K shows the best photocatalytic performance. (C) 2008 The Electrochemical Society.
Relation: Journal of the Electrochemical Society
Appears in Collections:[依資料類型分類] 期刊論文
[依教師分類] 薛富盛

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