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National Chung Hsing University Institutional Repository - NCHUIR > 工學院 > 工學院 > 依資料類型分類 > 期刊論文 >  Structure and mechanical properties of (TiVCr)N coatings prepared by energetic bombardment sputtering with different nitrogen flow ratios

Please use this identifier to cite or link to this item: http://nchuir.lib.nchu.edu.tw/handle/309270000/128656

標題: Structure and mechanical properties of (TiVCr)N coatings prepared by energetic bombardment sputtering with different nitrogen flow ratios
作者: Tsai, D.C.;Huang, Y.L.;Lin, S.R.;Jung, D.R.;Chang, S.Y.;Shieu, F.S.
張守一;薛富盛
日期: 2011
Issue Date: 2012-12-07 14:57:40 (UTC+8)
關連: Journal of Alloys and Compounds, Volume 509, Issue 6, Page(s) 3141-3147.
摘要: The (TiVCr)N coatings were deposited on Si substrate via rf magnetron sputtering of a TiVCr alloy target under dc bias in a N-2/Ar atmosphere. The deposition rate of the coatings gradually decreased with increasing N-2-to-total (N-2 + Ar) flow ratio, R-N. The TiVCr alloy and its nitride coatings exhibited a body-centered cubic (BCC) and a face-centered cubic (FCC) crystal structure, respectively. The preferred orientation of the (TiVCr)N coatings changed from (111) to (200) with increasing R-N. In addition, the microstructure of the nitride coatings was also converted from a columnar structure with void boundaries and rough-faceted surface to a very dense structure with a smooth-domed surface. The grain size of the (TiVCr)N coatings decreased as the RN was increased. Accordingly, the hardness of the (TiVCr)N coatings was enhanced from 4.06 to 18.74 GPa as the R-N was increased. (C) 2010 Elsevier B.V. All rights reserved.
Relation: Journal of Alloys and Compounds
Appears in Collections:[依資料類型分類] 期刊論文
[依教師分類] 張守一
[依教師分類] 薛富盛

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