English  |  正體中文  |  简体中文  |  Items with full text/Total items : 43312/67235
Visitors : 2020599      Online Users : 2
RC Version 5.0 © Powered By DSPACE, MIT. Enhanced by NTU/NCHU Library IR team.
National Chung Hsing University Institutional Repository - NCHUIR > 工學院 > 精密工程研究所 > 依資料類型分類 > 期刊論文 >  248 nm excimer laser drilling PI film for nozzle plate application

Please use this identifier to cite or link to this item: http://nchuir.lib.nchu.edu.tw/handle/309270000/135148

標題: 248 nm excimer laser drilling PI film for nozzle plate application
作者: Pan, C.T.;Yang, H.;Wei, M.K.
楊錫杭
關鍵字: 248 nm excimer laser;microholes;nozzle plate;PI;ablation;pulses
日期: 2007
Issue Date: 2012-12-14 11:38:49 (UTC+8)
關連: International Journal of Advanced Manufacturing Technology, Volume 34, Issue 9-10, Page(s) 889-897.
摘要: In this study, drilling of polyimide (PI) film by using a 248 nm excimer laser through photomask projection is presented. The parameter effects of laser fluence, shot number and repetition rate on the processing results are realized. A high-quality of microhole array with 50 mu m thick PI film has been fabricated. When the projection process is carried out, differences in the diameters of the microhole in the front and back sides of the PI are observed, which cause a conical shape in the kerf. The formation of this conical shape in terms of laser process parameters is discussed. Besides, to improve the laser machining quality of PI microholes, the effects of the process parameters are investigated and characterized. In addition, before excimer laser drilling PI is conducted, the PI surface is pre-coated with, or left without, a thin film material to observe the formation of debris. The results shows that the formation of debris can be reduced significantly when a pre-coated thin film is applied on the PI surface.
Relation: International Journal of Advanced Manufacturing Technology
Appears in Collections:[依資料類型分類] 期刊論文
[依教師分類] 楊錫杭
[依教師分類] 楊錫杭

loading Web of Knowledge data....

Files in This Item:

File SizeFormat
index.html0KbHTML383View/Open


 


學術資源

著作權聲明

本網站為收錄中興大學學術著作及學術產出,已積極向著作權人取得全文授權,並盡力防止侵害著作權人之權益。如仍發現本網站之數位內容有侵害著作權人權益情事者,請權利人通知本網站維護人員,將盡速為您處理。

本網站之數位內容為國立中興大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用。

聯絡網站維護人員:wyhuang@nchu.edu.tw,04-22840290 # 412。

DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU/NCHU Library IR team Copyright ©   - Feedback