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National Chung Hsing University Institutional Repository - NCHUIR > 理學院 > 物理學系所 > 依資料類型分類 > 期刊論文 >  Contrast distortion induced by modulation voltage in scanning capacitance microscopy

Please use this identifier to cite or link to this item: http://nchuir.lib.nchu.edu.tw/handle/309270000/145031

標題: Contrast distortion induced by modulation voltage in scanning capacitance microscopy
作者: M.N.Chang;C.W.Hu;T.H.Chou;Y.J.Lee
Contributors: Wei Chun Wang
日期: 2012-08
Issue Date: 2013-05-31 11:01:14 (UTC+8)
摘要: With a dark-mode scanning capacitance microscopy (SCM), we directly observed the influence of
SCM modulation voltage (MV) on image contrasts. For electrical junctions, an extensive
modulated area induced by MV may lead to noticeable changes in the SCM signal phase and
intensity, resulting in a narrowed junction image and a broadened carrier concentration profile.
This contrast distortion in SCM images may occur even if the peak-to-peak MV is down to 0.3 V.
In addition, MV may shift the measured electrical junction depth. The balance of SCM signals
components explain these MV-induced contrast distortions.
Relation: APPLIED PHYSICS LETTERS, Volume 101, Page(s) 83503-1~083503-4.
Appears in Collections:[依資料類型分類] 期刊論文
[依教師分類] 張茂男
[依教師分類] 張茂男

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