結合上述兩種方式，成功地製作週期性微米孔洞陣列矽太陽電池，其最佳能量轉換效率為9.02%，短路電流為25.5 mA/cm2。 In this thesis, we investigate the infiuence of micro-hole array structure on effect of light trapping, and the effect of solar cell’s efficiency as well. The design of radial p-n junction in micro-hole array was assumed to increase the carrier collection efficiency by horizontal carrier transport. This will improve short circuit current in a solar cell and hence the efficiency. The micro-hole array structures were accomplished by silver catalyzed wet chemical etching. Four different pitches were designed for micro-hole array with diameter and space is 10 min 10 μm and 40 μm respectively. After micro-hole array fabrication, the solar spectrum weighted total reflection was decreased to around 8.85%. In contrast, the planar Si exhibit reflection around 40%. By used sol-gel method deploy different organic solvents mixed phosphoric, and then fabricate p-n junction by spin-on-doping technique. It find H3PO4：methanol mixture provides the most adherent result, diffusion depth of 0.2 μm and doping concentration is 1017 cm-3. The fabrication of periodic micro-hole array silicon solar cells is successful. The best performance in terms of power conversion efficiency of 9.02% and the largest short circuit density of 25.5 mA/cm2.